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  1. Picosun - atomic layer deposition, ALD, ald reactor, ald equipment, ald system

    Picosun develops SUNALE™ Atomic Layer Deposition (ALD) systems for research and production. ALD films are used micro- and nanotechnology applications.
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    ALD1
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    atomic layer deposition1
    high aspect ratio1
    high-k1
    electroluminescent display1
    hafnium oxide1
    ald coating1
    ald equipment1
    ald reactor1
    ald tool1
    atomic layer deposition tool1
    diffusion barrier1
    DRAM memory1
    atomic layer epitaxy1
    conformal film1
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    ald film0
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    ald process tool0
    ald research0
    ald system0
    atomic layer deposition oxide0
    atomic layer deposition system0
    gate dielectric0

    www.picosun.com - 2009-02-13

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